■ Features
▶ Cleanroom environment—Class 100 cleanroom for thin-film manufacturing.
▶ Coating precision—Achieves 5 μm dry thickness with ≤ 3% uniformity.
▶ Online monitoring—ETA thickness gauge; AOI reflection/transmission defect inspection.
■ Specifications
■ Applications
Using AI real-time feedback and big-data analytics, combined with AI algorithms, the system
provides defect mapping, thickness distribution, and solvent-residue metrics, shortening
development time by 30% and reducing material consumption by 30%.
■ AI Applications:R2R Coating Mass
■ Contact Us
Material and Chemical Research Laboratories
Dept. of Opto-electronic Materials and
Films(L400)
Ming-Hsueh Chiang
Tel:06-3639130
E-mail:chiangmh@itri.org.tw