■ Introduction
▶ Compound semiconductor materials possess characteristics such as wide bandgap, high
power density, high breakdown voltage, low power loss, and superior heat dissipation.
Applications include photoelectric sensors, EV power modules, and RF components/
modules for high-frequency communication.
▶ SiC Coating Benefits: Coating SiC on graphite surfaces enables CVD SiC components
to withstand plasma erosion, high thermal shock, and provides high thermal conductivity
while reducing particle contamination. Therefore, CVD SiC is widely used in compound
semiconductor component processes.
■ CVD SiC Key Technology
■ Specification
▶ Coating area up to 20 cm in diameter.
▶ SiC coatings thickness >100 μm.
▶ SiC coatings structure: 3C-SiC.
▶ SiC coatings hardness>15 GPa.
■ CVD SiC Application
▶ SiC coating offers high hardness, heat resistance, oxidation resistance, corrosion resistance, and high thermal conductivity.
■ Contact Us
Material and Chemical Research Laboratories
Dept. of Advanced Silicon Carbide Coating
Technology and Application(JA00)
Jin-Bao Wu
Tel:03-5915282
E-mail:wujinbao@itri.org.tw