■ Technology Overview
Our analysis team has extensive experience and diverse electron microscopy sample preparation techniques in various fields including metal materials, electronic and optoelectronic materials, biomedical materials, petrochemical materials, soft matter, composite functional devices, and many of the nanoproducts available in the market. We provide high-quality and efficient analysis results of electron microscopes for businesses.
▣ SEM Inspection is Highly Used in the IC, Material, and Optoelectronic Industries
* High-quality sample preparation technology over a large area
• True observation surface area without stress failure
• Cross-section of composite materials with large differences in hardness
• Large area (~cm) ion beam stress removal and microetching technology
* Nanoscale SDD EDS analysis
• Structure and elemental composition analysis of multilayer membrane elements
• Element distribution analysis of trace doped element in the nanocomposite
* EBSD analysis technology
• Suitable for metallic and non-conductor materials
• Systematic analysis of EBSD diffraction patterns
• Analysis of crystalline orientation and crystal preferred direction of polycrystalline materials
• Grain boundary property analysis and grain size distribution analysis
• Micro-area multiphase structure identification
• KAM analysis-locally regional strain analysis of polycrystalline structures
• Crystallization orientation and grain size analysis of large grains (~mm)
* Low-damage and high-contrast analysis techniques using SEM
The performance and microstructure of high-value polymers are strongly correlated, but due to their composition of organic light elements, their ability to scatter electrons is weak, resulting in low electron density contrast in the electron microscopy. Therefore, the development of low-damage and high-contrast electron microscopy analysis techniques can provide an advanced material formulation development for the industry, academia, and research community.
* Cathodoluminescence (CL) analysis
• Point spectrum measurement of luminescent devices
• Point bandgap analysis of semiconductor materials and devices
• CL analysis of laser-modified surfaces
• Microstructure and optical properties research of LED, OLED, QD, fluorescent and phosphorescent materials
• Widely used in the current optoelectronics industry
* Liquid sample detection and analysis
Traditional drying methods often cause materials to shrink, resulting in deformation in the microstructure. In addition, organic/inorganic composite are often covered by organic substances on the surface, making it difficult to obtain the true morphology of the material. However, the true morphology of the material is often a key factor that affects its properties.
Therefore, by using a liquid cell to create an atmospheric environment in the SEM vacuum environment, the original morphology of the sample can be preserved without distortion.
This analysis would provide the industry and academia with the opportunity to conduct advanced materials research.
▣ Staining and Cryo-EM Sample Analysis Services
* Advanced Low-Temperature Sample Preparation and Transfer Technology
• Suitable for carrier detection of Micelles, Liposomes, Proteins, etc.
• Low temperature, low pressure, low radiation damage electron microscope carrier, very suitable for biological and polymer samples
• Developing in situ liquid carrier technology
* Cryo-EM analysis of drug-loaded materials
The key development of COVID-19 vaccines like BNT and Moderna is the LNP (Lipid Nanoparticle) technology that enables the transfer of nucleic acids.
The availability of these vaccines has also established the technological foundation for the development of future nucleic acid drugs. Through utilizing the low-temperature electron
microscopy analysis technique, we can obtain clear LNP images and determine the location of mRNA within the LNP.
* TAF certification for the Biomedical material
We established the first and only biotechnology TAF certification service in Taiwan. Offer liquid nitrogen cryoelectron microscopy detection and image analysis, and combine with the systemized data evaluation mode of the Industrial Technology Research Institute Measurement Center to meet the standards of the Taiwan Accreditation Foundation (TAF). The related technology can provide the structure information for R&D and scale certification services.
• Microstructure identification
• Impurity component identification
• Inspection report by a third-party independent organization
* Biomolecular Electron Microscopy Imaging
• Suitable for analysis of biomedicine, plant and animal cells, and Bacteria
• Intelligent selection and particle size measurement of biomolecular drugs
▣ Tem Inspection Comprehensive Services for Electronics, Optoelectronics, and Petrochemical Industries
* In situ dynamic analysis capability
Temperature and bias voltage controllable
* TEM Tomography Structural Analysis
• Full-angle precise tomography- three-dimensional (3D) electron microscopy imaging technology development
• Completed tilt angle range: ±90 degrees
• Comprehensive applications of nano materials, polymer composite materials, electronic components, and energy industry, to understand their complete 3D structure
* Advanced semiconductor, automotive electronics, memory and other devices development
• Research and development of advanced electronic materials and devices
• Assist in optimizing process parameters and analyzing failure products
▣ Highly Efficient Low-Voltage Aberration-Corrected Atomic-Resolution TEM Applied to Emerging 2D Materials, Advanced Semiconductor Devices (FinFET & GAA), Polymer Composite Materials and Lithium Battery Related Industries
* Construction of Cs-corrected TEM environment
* Sub-atomic resolution imaging capabilities at low voltages
* Light-atom imaging system
* EELS analysis of IC device
* Rapid high spatial resolution elemental analysis
* High-energy resolution elemental bonding analysis
* STEM-Moire stress analysis technology Applied to advanced research such as Graphene, Block copolymer, Fin-FET, and lithium batteries
▣ High-Throughput and High-Energy Resolution X-Ray Fluorescence Analysis Services
* High-throughput, rapid and accurate analysis of complex multicomponent
• Compositions
• Elemental analysis range: 4Be~92U
• Applicable to various sample forms such as solids, liquids, powders, and thin films
• Non-destructive testing
• Qualitative/semi-quantitative/quantitative analysis
• Multiple automatic sample introduction function
• Confirmation of component and concentration of process trace impurities /contaminants
• Analysis of hazardous substance composition and concentration (e.g., heavy metals)
* Measurement of thin film thickness and composition analysis on wafers
• Elemental analysis range: B to U
• Film thickness range: 1nm to 0.1mm
* Micro-area elemental mapping scanning analysis
• Can generate elemental distribution maps and CCD sample observations
• Spatial resolution <500 μm
▣ Lithium Battery Structure and Composition Analysis and Testing Services
* Environmental protection low-temperature ion beam crosssection sample preparation
* Lithium dendrite surface morphology and lithium dendrite cross-section structure
* Distribution and composition of light elements (lithium)
* Half-cell, full-cell microstructure and failure analysis
Application of Microstructure Analysis for Battery Cathodes, Anodes, Separators, Solid Electrolyte Membranes, and Battery Charge/Discharge/Cycling Degradation.
Industrial Technology Research Institute (ITRI)
Material and Chemical Research Laboratories (MCL)
Dept. of Electron Microscopy Development and Application (M300)